Our challenge is to develop detectors with adequately low noise to resolve these energies, and with shallow entrance windows to avoid absorbing the x-rays in the insensitive region of the sensor. To take advantage of this potential we need to develop detectors for soft x-rays from 250 eV to 1.5 KeV. SLAC’s LCLS-II will provide unique opportunities for scientific imaging. This technique is useful for other sensor applications requiring a shallow entrance window, including detectors for UV photons, low energy ions and low energy electrons. Process and device simulations were performed to characterize the quantum efficiency of the entrance window for soft x-rays. The sensors have been bump-bonded to a read-out ASIC and used successfully to measure an Fe-55 x-ray spectrum. Electrical test of the resulting sensors shows good reverse bias characteristics. We then applied the microwave anneal process to a planar sensor wafer, using the new process to create the backside diode contact. SRP and SIMS measurements were used to verify dopant activation with negligible dopant diffusion. The microwave anneal technique can activate dopants at low substrate temperature, with minimal dopant diffusion, and can be used to fabricate both n-type and p-type entrance windows. A new microwave annealing technology provides an efficient way to achieve shallow entrance windows in fully depleted high-resistivity silicon sensors. Achieving adequately shallow entrance windows is challenging because the high temperature anneal needed to activate the dopant also drives the dopant profile deeper, growing the region that is insensitive to soft x-rays. In order to fully utilize these facilities, we need to develop detectors with shallow entrance windows that will enable detection of soft x-rays from 250 eV to 1.5 KeV. New free electron lasers, such as SLAC’s LCLS-II, will provide unique scientific imaging opportunities. 2DSG Technologies, San Jose, CA, United States.1SLAC National Laboratory, Stanford University, Menlo Park, CA, United States.Kowalski 2, Gabriel Blaj 1, Lisa Rozario 1, Jasmin Hasi 1, Angelo Dragone 1, Pietro Caragiulo 1 and Lorenzo Rota 1

Julie Segal 1*, Christopher Kenney 1, Jeffrey M.

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